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SMARTIEHS

SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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Background

Why SMARTIEHS?
The SMARTIEHS project removes the bottle neck in the production of MEMS and MOEMS - the quality test of the structures during and after production. SMARTIEHS develops a measurement system based on a parallel approach reducing the measurement time by the factor of interferometers in the system. On a 8 inch wafer a reduction of inspection time by a factor of 100 can be optained. Furthermore SMARTIEHS uses a multifunctional approach integrating different funcionality in one instrument.
State of the Art MEMS testing
MEMS are today tested on the wafer level using a serial approach, which means that the inspection system is scanned from structure to structure over the whole wafer. In production line mostly the testing of passive parameters are carried out.
What can SMARTIEHS do for you?
SMARTIEHS develops a major breakthrough in M(O)EMS-testing realising a system for parallel test and in some cases calibration of all M(O)EMS structures on the wafer level.
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