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SMARTIEHS

SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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 M(O)EMS
Micro(Opto)ElectroMechanicalSystems covers both MOEMS and MEMS. M(O)EMS are produced by silicon machining on Silicon wafers each containing from tens up to more than thousand devices.
 MEMS
MicroElectroMechanicalSystems
 MOEMS
MicroOptoElectroMechanicalSystems
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