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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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Read the last NEWS about SMARTIEHS

Here you can follow the last NEWS about the SMARTIEHS project. Conference presentations and the exhibition at fairs will be announced here.

If you want to stay informed about the progress of our project you can subscribe to the NEWS feed by pressing the "RSS feed" buttom on the bottom of the page.

6th Project Managment Board meeting in Besancon
The 6th PMB meeting was held 14./15. October in Besancon at CNRS FEMTOS facilities. The consortium updated the PMB about the status of the project and took important decisions about the realisation of the last project phase.
SMARTIEHS Laser Interferomter array installed
At the end of September 2010 also the laser interferomter array was installed at the SUSS prober in Ilmenau.
SMARTIEHS exhibits two demonstrators at ICT2010 in Brussels
SMARTIEHS test station assembled in Ilmenau
The first prototype of the SMARTIEHS test station is assembled on a SUSS prober in Ilmenau. All components work as expected.
SMARTIEHS presented in SPIE Newsroom
The Smartiehs project is now presented with a detailed an open acces paper in the SPIE Newsroom for Micro and Nano Lithography & Fabrication
SMARTIEHS passed the second project review with good evaluation
The scientific reviewers from the EC give SMARTIEHS good and very good evaluation at the midt term review.
The second release of the SMARTIEHS newsletter is now online
SMARTIEHS gets large interest during Photonics Europe 2010
SMARTIEHS was presented at Photonics Europe in Brussels. Both an invited presentation and an exhibition of the two SMARTIEHS demonstrators at the innovation Village was visited by many participants.
Come and see the SMARTIEHS demonstrators at the Innovation Village in Brussels 13.-15. April 2010
The two first demonstrators of the SMARTIEHS inspection concept can be seen at the Innovation Village at the SPIE conference Photonics Europe in Brussels next week.
5th Project Managment Board Meeting in Trondheim
The SMARTIEHS consortium met for the 5th PMB meeting in Trondheim. The seminar focused on the preparation of the 2nd review meeting in Mai.
Invited presentation at Photonics Europe 2010 in Brussels
SMARTIEHS will give an invited presentation at the SPIE conference "Optical Micro- and Nanometrology" at the Photonics Europe in Brussels 12.-17.April 2010
SMARTIEHS wishes a Merry Christmas and a Happy New Year
SMARTIEHS wishes all our partners and interested readers a Merry Christmas and a Happy New Year 2010
SMARTIEHS shows the first 5 channel demonstator at Photonics Europe 2010
SMARTIEHS will exibit the multi channel demonstators at the Innovation Village 2010 which is part of the SPIE Photonics Europe conference in Brussels
The SMARTIEHS first newletter is now online.
4th IAB meeting in Zurich
SMARTIEHS carried out 4th IAB meeting in Zurich
Project Managment Board meeting in Zurich
SMARTIEHS had its 4th Project Managment Board (PMB) meeting in Zurich on 15. October 2009.
SMARTIEHS presented at EPoSS
SMARTIEHS was presented at this year's General Assembly and Annual Forum of EPoSS.
SMARTIEHS 4th Industrial Advisory Meeting 14. October 2009
SMARTIEHS 4th industrial advisory meeting takes place in Zuerich 14th of October 2009. The partners will discuss the results of the design phase in SMARTIEHS with representatives from the MEMS industry.
SMARTIEHS reaches its 2nd Milestone
SMARTIEHS reaches its second milestone and finishes the design phase of the project
SMARTIEHS gets large interest at the FRINGE'09 conference
SMARTIEHS was presented with 3 presentations at the wellknown conference Fringe'09 in Stuttgart.
SMARTIEHS has new coordinator from 1. September
Dr. Kay Gastinger takes over for Sebastiano Lombardo as the SMARTIEHS coordinator. The consortium thanks Mr. Lombardo for his excellent work.
SMARTIEHS presented at two fairs in Italy
Our SMARTIEHS partner Techfab presented the project at two fairs in Italy.
SMARTIEHS at Fringe 09 conference in Stuttgart
SMARTIEHS is represented with two oral presentations and one poster presentation at the Fringe conference in Stuttgart. The design of the micro optical interferometers will be in focus.
SPIE Optical Metrology Munich
SMARTIEHS presents at the Optical Metrology conference organised by SPIE in Munich 14.-18. June 2009. The conference is co-located with the LASER exhibition.
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