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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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5th Project Managment Board Meeting in Trondheim

The SMARTIEHS consortium met for the 5th PMB meeting in Trondheim. The seminar focused on the preparation of the 2nd review meeting in Mai.

17 members of the SMARTIEHS consortium discussed on the 2-days seminar the administrative and scientific progress of the project.

The main focus of the meeting was on the preperation of the second review meeting. In particular the microproduction of the probing wafers and the development of the instrument frame were discussed.

In the administrative part of the meeting was concentrated on the newest dissemination results and the further development of the exploitation strategy. The IPR strategy was discussed and the roadmap for the SMARTIEHS patent applications was accepted.

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