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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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6th Project Managment Board meeting in Besancon

The 6th PMB meeting was held 14./15. October in Besancon at CNRS FEMTOS facilities. The consortium updated the PMB about the status of the project and took important decisions about the realisation of the last project phase.

The consortium presented the status of the ongoing work packages WP6 and WP7.

WP 6 has good progress and the inspection station as now assebled and ready for the first tests.

WP 7 needs a replanning and there was strong focus on the content of this workpackage and how to realise the important test and validation phase of the project.

Also mangement issues were discussed.

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