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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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SMARTIEHS at Fringe 09 conference in Stuttgart

SMARTIEHS is represented with two oral presentations and one poster presentation at the Fringe conference in Stuttgart. The design of the micro optical interferometers will be in focus.

The following papers will be presented:

Kay Gastinger, Karl Henrik Haugholt, Arne Røyset, Jorge Albero, Uwe Zeitner, Christophe Gorecki "Design of a micro-optical low coherent interferometer array for the characterisation of MEMS and MOEMS"

Styk, M. Kujawińska, P. Lambelet, A. Røyset, S. Beer "Microelements vibration measurement using quasi-heterodyning method and smart-pixel camera.”

M. Józwik, M. Kujawińska, U.D. Zeitner, K.H. Haugholt “Optical design of a DOE-based laser interferometer for inspection of MEMS/MOEMS



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