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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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SMARTIEHS gets large interest during Photonics Europe 2010

SMARTIEHS was presented at Photonics Europe in Brussels. Both an invited presentation and an exhibition of the two SMARTIEHS demonstrators at the innovation Village was visited by many participants.

The Photonics Europe was a succesfull event for the SMARTIEHS project. In total 1500 researchers within Photonics from all over the world participated in the conference and the connected exhibition.

The SMARTIEHS project participated in the exhibition "Innovation village". This part of the exhibition was reserved for the presentation of research projects. 21 projects were presented and the scientific quality was high. The SMARTIEHS booth was frequently visited by the guests of the exhibition and the participants at the conference. In the Award competition SMARTIEHS came on the 4th place in the category for multilateral research projects.

SMARTIEHS had one invited presentation and one poster presentation at Photonics Europe.

The references for the presentations are given below:

Kay Gastinger, Lars Johnsen, Malgorzata Kujawinska, Michal Jozwik, Uwe Zeitner, Peter Dannberg, Jorge Albero, Sylwester Bargiel, Christoph Schaeffel, Stephan Beer, Rudolf Moosburger, Patrick Lamberlet and Marco Pizzi, Next generation test equipment for micro-production, SPIE proc. 7718., p.7718-14, (2010)

Jorge Albero, Sylwester Bargiel, Christophe Gorecki, Kay Gastinger Integrated glass lenses fabrication for parallel interferometric inspection systems of MEMS and MOEMS, SPIE proc. 7716, p. 7716-72, (2010)


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