Skip to content. | Skip to navigation

SMARTIEHS

SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

Sections
Personal tools
You are here: Home News SMARTIEHS Laser Interferomter array installed

SMARTIEHS Laser Interferomter array installed

At the end of September 2010 also the laser interferomter array was installed at the SUSS prober in Ilmenau.

All 25 Laser diode cartridges have been mounted in the system. Fringes in all channels were obtained. That proves the principle of the interferometers.

The first production run of the probing wafer showed some defect channels. This will be corrected by the second production run available by the end of December 2010.

The test of the interferometers will be continued at the end of November, when the excitation wafer for the Laser interferometer array is available.

Document Actions