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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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SMARTIEHS presented in SPIE Newsroom

The Smartiehs project is now presented with a detailed an open acces paper in the SPIE Newsroom for Micro and Nano Lithography & Fabrication

The SPIE Newsroom for Micro and Nano Lithography & Fabrication published these days a presentation of the SMARTIEHS project. The article can be reached via the following link:

http://spie.org/x39600.xml?ArticleID=x39600

The reference for the paper is:

 

Kay Gastinger and Odd Løvhaugen "Next-generation test equipment for high-volume wafer production", SPIE Newsroom for Micro and Nano Lithography & Fabrication, Mai 2010

 

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