Skip to content. | Skip to navigation

SMARTIEHS

SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

Sections
Personal tools
You are here: Home News SMARTIEHS reaches its 2nd Milestone

SMARTIEHS reaches its 2nd Milestone

SMARTIEHS reaches its second milestone and finishes the design phase of the project

With the final design of the micro optical interferometer arrays reaches SMARTIEHS its second milestone in time. The design of the interferometers was in detail presented at the FRINGE09 conference in Stuttgart medio September.  The next period of the project is dominated by the production of the components of the inspection system.  Here in particular the production of the micro-optical components is challenging.

Document Actions