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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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SMARTIEHS test station assembled in Ilmenau

The first prototype of the SMARTIEHS test station is assembled on a SUSS prober in Ilmenau. All components work as expected.


In the last week of August representatives from SINTEF, IMMS and Heliotis were in Ilmenau to assemble the induvidialy produced components in the final inspection system. This is a Milestone in the SMARTIEHS project.

In the first round only the LCI system was fully installed. All components including the probing wafer, the Smart Pixel Camera and the drive system were working as expected. The SMARTIEHS experts will now based on the first test in Ilmenau improve the individual components and the overall performance of the system.

The LI part of the system will be implemented by the end of September.

final probing wafer in demonstrator    SMARTIEHS instrument in test station

SNARTIEHS instrument in SUSS prober  height map

Assembling of the SMARTIEHS inspection station upper left: LCI probing wafer during the last tests in the LCI demonstrator, upper right: instrument frame with drive system in the alignment rig - Norbert Zeike installs the camera module, lower left: Jorge Gonzalez mounts of the inspection station on the SUSS prober, lower right: first height map of the master object (IR sensor) aquired with the SMARTIEHS instrument

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