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SMARTIEHS

SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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SPIE Optical Metrology Munich

SMARTIEHS presents at the Optical Metrology conference organised by SPIE in Munich 14.-18. June 2009. The conference is co-located with the LASER exhibition.

The detailed concept of SMARTIEHS inspection station will be presented at the SPIE conference "Optical Metrology" in M√ľnchen 14.-18-Juni 2009 (http://spie.org/x6506.xml). The titel of the Oral presentation is: "Optical, mechanical, and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS".

The complete reference of the paper is:

K. Gastinger, K. H. Haugholt, M. Kujawinska, M. Jozwik, Technology (Poland); C. Schaeffel, S. Beer,
"Optical, mechanical, and electro-optical design of an interferometric test station for massive parallel inspection of MEMS and MOEMS," in Optical Measurement Systems for Industrial Inspection VI, edited by Peter H. Lehmann, Proceedings of SPIE Vol. 7389 (in press), 73891J

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