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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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SINTEF is the coordinator of the project. Furthermore SINTEF contributes within the following areas: optical design, micro-optics design, low coherence interferometery, research on methods, tools and transformations and industrial system integration
WUT is leader of WP3 (development of micro-optical sensor for laser interferometry)- specifically development of the architecture, providing models and proof-of-concept and software for signal/image analysis. Furthermore WUT contributes within optical design, wave optical design, laser interferometry and image processing.
Fraunhofer IOF
The Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. (FhG) is a link between science and industry, that is between the research and the application of its results. The Fraunhofer IOF is one of 58 non-independent research institutes belonging to the Fraunhofer-Gesellschaft. Research and development at Fraunhofer IOF focuses on optical systems technology with a view to continually improving the control of light from generation via guiding and manipulation up to its application.
CSEM SA is the leader of work package 5, the development of the smart-pixel camera. CSEM SA is a privately-held company operating on a not-for-profit basis. Its main focus is applied R&D and low volume production in the domains of micro- and nano-technologies as well as advanced system engineering.
TECHFAB SRL is the leader of work package 7: proof-of- concept and validation. TECHFAB contributes to the definition of the end user requirements, testing and verification.
Heliotis is the leader of work package WP8: exploitation and dissemination of results. Furthermore, as an industrial partner Heliotis contributes to the definition of system requirements, user interface, testing and verification.
CNRS participates through the Department of Micro-Nano Sciences & Systems at FEMTO-ST, which is a joint research unit (UMR 6174) affiliated to the University of Franche-Comté, the CNRS, the National High School of Mechanics and Microtechniques (ENSMM) and the University of Technology of Belfort-Montbeliard (UTBM).
The Institut für Mikroelektronik- und Mechatronik-Systeme gGmbH (IMMS) is the leader of work package 6, which includes the construction of the inspection system, the software development, the system integration and development of parameter identification algorithms. The IMMS is a state-owned out-of-university institute in the field of application-oriented preparatory research for the development of products of microelectronics and system engineering.
The Industrial Advisory Board is the contact point of the project towards the test equipment industry and the MEMS/MOEMS industry.
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