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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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CNRS participates through the Department of Micro-Nano Sciences & Systems at FEMTO-ST, which is a joint research unit (UMR 6174) affiliated to the University of Franche-Comté, the CNRS, the National High School of Mechanics and Microtechniques (ENSMM) and the University of Technology of Belfort-Montbeliard (UTBM).

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CNRS is represented by the Institute FEMTO-ST. It is a Carnot Institute too and contains five research departments specialized in optics, mechanics, microelectronics, microsystems and material sciences, representing a potential of 535 scientists. FEMTO-ST participates in the SMARTIEHS project through the Département Micro Nano Sciences & Systèmes (MN2S).

The scientific scope of MN2S encompasses all technical fields relevant to the highly multidisciplinarly world of micro-nano sciences and technologies, including phononics, microoptics, MEMS and MOEMS, material science at the micro & nano scale, micro & nano fabrication and micro & nano scale instrumentation. It is one of the most significatn french groups in this field. The team concerned by the scope of this project is the team "Multiphysics Microsystems", headed by C. Gorecki. The group is specialized in MOEMS sensors. The research focus is the development of miniature optical sensors made using batch-fabrication processes (silicon technology and III-V materials). This activity combines the integrated optics with micromechanical structures and offers new integration potentials for sensing applications and also atomic clock applications. MOEMS group was and is involved in several European research programmes such as Marie Curie, GROWTH and IST programes of the EU, NATO programe, and mobility programs such as SOCRATES. The group has cooperations in Europe and overseas (Switzerland, Germany, Poland, Japan, etc.) .

FEMTO-ST has an important technological platform: 850 m2 class 100/1000 clean room area including mask and wafer processing equipment, nanofabrication equipments and characterisation devices. This technology platform, called MIMENTO, is now labeled as the 5th national technological center in micro-techniques and nanotechnology. Technology equipment contains:  1 micron photolithography facilities, wafer spinners, CVD deposition, wet chemical etching bench, thin film deposition/growth (sputtering, evaporation, PECVD and electro-plating), oxydation furnace, dry etch, deep RIE for Si and quartz, Si and III-V RIEs, wafer bonding, focused ion beam, mechanical and optical characterization, ellipsometry, AFM and SNOM microscopes, optical microscopes, packaging equipment, planarization system, etc.

The contribution to the SMARTIEHS project concerns the microprocess technology for microlenses and micromirror production.


C. Gorecki

D. MN2S, FEMTO-ST, Univ. Franche-Comté

16 route de Gray, 25030 Besançon Cedex


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