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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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The Industrial Advisory Board is the contact point of the project towards the test equipment industry and the MEMS/MOEMS industry.

The SMARTIEHS initiative has experienced a large interest among M(O)EMS and companies and test equipment providers. The consortium has decided to included an Industrial Advisory Board (IAB).

Until now we have 4 members in our Industrial Advisory Board:




Field of industry

SUSS MicroTech Test Systems GmbH


micro processing equipment, test equipment producer

SUSS MicroTech Micro Optics


micro optics producer



MEMS producer



MEMS producer


These members are selected with a special attention. The SMARTHIES interferometer is mounted on a SUSS test station. For commercialisation SUSS Test Systems can be a partner for Heliotis. Heliotis is in this constellation selling the interferometer to SUSS Test Systems. They integrate the interferometer in their test station and will commercialise the test station. The reason why SUSS is not included in the project is the state-of-the-art of the test stations; the wafer handling and positioning are standard processes in micro technology.

SUSS Micro Optics can be the commercialisation partner for the probing and the light guiding wafers.

Melexis and ST-Microelectronics are large MEMS producers. They will support the consortium with the necessary input from these customers.

The SMARTIEHS IAB will be extended throughout the project lifecycle. If your ompany is interested in SMARTIEHS you can apply for participation by sending an Email to:


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