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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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SINTEF is the coordinator of the project. Furthermore SINTEF contributes within the following areas: optical design, micro-optics design, low coherence interferometery, research on methods, tools and transformations and industrial system integration




The SINTEF Group is the largest independent research organisation in Scandinavia. SINTEF has approximately 1900 employees.

SINTEF Information and Communication Technology (ICT) is one of 7 research divisions within the SINTEF Group. SINTEF ICT offers integrated research-based knowledge via access to a broad platform of technology and competence in ICT. SINTEF ICT has 260 employees. SINTEF ICT provides research-based expertise, services and products ranging from micro technology, communication and software technology, computational software, information systems and security and safety.

The Optical Measurement Systems and Data Analysis Department (28 people) at SINTEF ICT develops industrial measurement systems based on competence in optics, spectroscopy, lighting, computer vision and data analysis. The department develops sensors and measurement systems for several focus application areas including recycling technology, 3D shape measurement systems, materials characterization, gas measurements, MEMS-inspection and food quality inspection. The department has developed several micro optical solutions for material characterization and gas detection based on Diffractive Optic Elements.

The Microsystems and Nanotechnology Department (42 people) at SINTEF ICT specializes in the design and fabrication of advanced sensors and actuators. Designs may be realized in our state-of-the-art automated 800 m2 silicon clean room fabrication facility (ISO 9001:2000 certificated) at the prototype or small-series production level. The group has a strong capability in finite element based modelling of mechanical, thermal, acoustic, electrical, fluid and other properties of micro-structures. The department possesses a silicon wafer process line scaled for small-series production of micro-optical components including diffractive optical elements and infrared sources.


Kay Gastinger
7365 Trondheim

phone: +4773590457

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