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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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All SMARTIEHS publications are listed here:

RF-MST Cluster Workshop 2008
The SMARTIEHS co-ordinator SINTEF represented the consortium at the RF-MST Cluster Workshop 2008 in Heraklion. The SMARTIEHS concept was discussed with representatives from the industry.
Microoptics Conference MOC08
The Smartiehs concept was for the first time presented at the Microoptics Conference MOC08 in Brussels.
Optical Metrology 2009 Munich
The detailes instrument concept and the first configuration of the micro optical interferometers are presented in this paper.
3rd Topical Meeting on Optical Microsystems, Sept. 2009 in Capri
An interferometric test station for massive parallel inspection of passive and active M(O)EMS
FRINGE 2009 - The 6th International Workshop on Advanced Optical Metrology
Invited presentation at Photonics Europe 2010 in Brussels
SMARTIEHS will give an invited presentation at the SPIE conference "Optical Micro- and Nanometrology" at the Photonics Europe in Brussels 12.-17.April 2010
Poster presented at "The European Material Conference"
Invited paper at International Symposium for Advanced Photonics Electronics, October 2009, Tokyo
Advanced M(O)EMS and measurements
Invited paper at Proc. 15th Micro-Optics Conference MOC'09, October 2009, Tokyo
State of the art measurements for micro-optical components
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