Invited paper at Proc. 15th Micro-Optics Conference MOC'09, October 2009, Tokyo
State of the art measurements for micro-optical components
M. Kujawinska (1), H. Ottevaere (2)
(1) Institute of Micromechanics and Photonics, Warsaw University of Technology,
8 Sw. A. Boboli St., 02-525 Warsaw, Poland,
(2) Dept. of Applied Physics and Photonics (FirW-TONA), Vrije Universiteit Brussel, Brussel, Belgium
We present the state of art in full-field methods of testing and characterization of selected groups of micro-optical components which play crucial role in building optical microsystems. These include: microlenses and microlens arrays, 3D transmissive microoptical structures (waveguides, microinterferometers, fibre optics accessories) and M(O)EMS. The methods presented and discussed are: conventional, in-situ and IR interferometry, interferometric photoelastic tomography and active and parallel interferometry.