Skip to content. | Skip to navigation


SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

Personal tools
You are here: Home Publications Microoptics Conference MOC08

Microoptics Conference MOC08

The Smartiehs concept was for the first time presented at the Microoptics Conference MOC08 in Brussels.

Four partners of the project participated in the Microoptics Conference MOC08 in Brussels, Belgium from September 25 – September 27 2008 ( The project was represented in a poster session.

Kay Gastinger, Malgorzata Kujawinska, Odd Løvhaugen, Stephan Beer, Christophe Gorecki, Uwe Zeitner, ”SMARTIEHS - SMART INSPECTION SYSTEM FOR HIGH SPEED AND MULTIFUNCTIONAL TESTING OF MEMS AND MOEMS”


This paper describes the instrument concept of the EU project SMARTIEHS. A parallel inspection system for production control of Micro(Opto)ElectroMechanicalSystems (M(O)EMS) is developed. A exchangeable probing wafer, consisting of a micro-optical interferometer array, is adapted to the M(O)EMS wafer under test. A smart pixel camera array detects the interference signal.


Document Actions