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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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Optical Design

The optical design of the SMARTIEHS instrument reflects the parallel approach of the inspection concept. The detailed design will be introduced while the project continues. Come back and stay updated!


The test system concept is shown in the figure above. The light source is exchangeable from a low coherent source (e.g. LED) to a laser source (e.g. laser diode). The requirements to the laser source are rather low due to the short optical path length difference in the interferometer arms (typical<500┬Ám).

Illumination, probing and imaging wafer are all exchangeable. The M(O)EMS wafer is mounted and positioned using a wafer handling and positioning system available in commerce.

The interferometers are placed in a regular 5x5 array. Each interferometer channel has its own light source and is separated to avoid cross talk. Also the camera is devided into a distributed 5x5 array containing 140x140 smart pixels each.

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