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SMART InspEction system for High Speed and multifunctional testing of MEMS and MOEMS

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System Specifications

The Smartiehs specification phase is now completed. Find the main specifications here

The main specifications are:

  • Interferometer matrix resolution: 10x5 (scaleable)
  • Imager array resolution: 5x5,
  • Imager resolution: 140x140 pixels
  • Spatial resolution: 5µm,
  • Field of view: 600x600µm2, Magnification: about 9x
  • Measurement resolution:
    • Shape (step-like objects): 2 λ (ca 1µm)
    • Shape (smooth objects): λ/20 (ca.25nm)
    • Deformation: λ/10 (ca.50nm)
    • Resonance frequency: FWHM/2
    • Min vibration amplitude: 10nm
  • Interferometer pitch: 13,76mm
  • Height range: 0-600µm
  • Frequency range: 10kHz-1MHz
  • Measurement time per 25 structures:
  • shape: 1s
  • deformation: 2s
  • resonance frequency: 2s/100f 


 For comments or questions regarding the SMARTIEHS specifications please contact us.

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